Preparation of ZrO<sub>2</sub>-Y<sub>2</sub>O<sub>3</sub> Films by CVD Using β-Diketone Metal Chelates
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Journal of the Ceramic Society of Japan
سال: 1993
ISSN: 0914-5400,1882-1022
DOI: 10.2109/jcersj.101.291